In semiconductor wet etching process, experts suggest that you choose an etching system that uses quartz tank (or is made from quartz materials). And there are compelling reasons why this is so. Well, aside from it is made from the second most abundant mineral that can be found in the Earth's continental crust, some practical reasons why it is recommended (and why you should use quartz tank) are the following:
Durability -- harder than granite and other well-known metals, quartz ranks 7th on the Mohs scale of mineral hardness. So, equipment that is made from quartz are durable as well; this is true when we talk of quartz tanks. Its durability is one that has made it popular in the industry.
Non-reactivity to a variety of chemistries -- there is nothing to worry about contamination of the processed semiconductor as quartz tanks do not react with the chemistries/substances you use in the wet etching process. You still are going to have an output that is of high quality and purity.
High purity - in the processing of semiconductor substrates, it requires high quality materials so that the final output you will have is contamination-free. Quartz tank is on top of the list of recommendations from experts in the industry.
Aside from quartz tanks, there are other products as well that are made from quartz that are useful also in wet etch processing. Some of these products are the following:
Quartz boats - also known as substrate carriers; designed to accommodate wafers of 4", 6", 8", and 12" in diameter; they can come in various designs or sizes and manufacturers can also design according to your specifications.
Quartz chambers -- designed to accommodate plasmas that can reach extremely high temperatures but need high purity and visual verification; they are ideal because they are high resistant to heat.
Quartz drains -- in general, these components are put on either the side or below the quartz tanks; these are utilized to recirculate chemistries or for chemical disposals.
Quartz aspirators - these are also known as filter pumps; the tool is used to produce a vacuum by means of the Venturi effect; this is utilized in high temperature applications.
Quartz boat adapters - for cost reduction in wafer processing; can also help in increasing production throughput.
Durability -- harder than granite and other well-known metals, quartz ranks 7th on the Mohs scale of mineral hardness. So, equipment that is made from quartz are durable as well; this is true when we talk of quartz tanks. Its durability is one that has made it popular in the industry.
Non-reactivity to a variety of chemistries -- there is nothing to worry about contamination of the processed semiconductor as quartz tanks do not react with the chemistries/substances you use in the wet etching process. You still are going to have an output that is of high quality and purity.
High purity - in the processing of semiconductor substrates, it requires high quality materials so that the final output you will have is contamination-free. Quartz tank is on top of the list of recommendations from experts in the industry.
Aside from quartz tanks, there are other products as well that are made from quartz that are useful also in wet etch processing. Some of these products are the following:
Quartz boats - also known as substrate carriers; designed to accommodate wafers of 4", 6", 8", and 12" in diameter; they can come in various designs or sizes and manufacturers can also design according to your specifications.
Quartz chambers -- designed to accommodate plasmas that can reach extremely high temperatures but need high purity and visual verification; they are ideal because they are high resistant to heat.
Quartz drains -- in general, these components are put on either the side or below the quartz tanks; these are utilized to recirculate chemistries or for chemical disposals.
Quartz aspirators - these are also known as filter pumps; the tool is used to produce a vacuum by means of the Venturi effect; this is utilized in high temperature applications.
Quartz boat adapters - for cost reduction in wafer processing; can also help in increasing production throughput.
About the Author:
Roy Van Rivero writes a wide variety of technology-related subjects. He uses his years of work experience in the industry in writing these topics, including quartz tanks and inline heater for semiconductor. To learn more, visit Imtec Acculine, developer of wet process module and system.
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